JPH03110836U - - Google Patents
Info
- Publication number
- JPH03110836U JPH03110836U JP1983990U JP1983990U JPH03110836U JP H03110836 U JPH03110836 U JP H03110836U JP 1983990 U JP1983990 U JP 1983990U JP 1983990 U JP1983990 U JP 1983990U JP H03110836 U JPH03110836 U JP H03110836U
- Authority
- JP
- Japan
- Prior art keywords
- end point
- etching end
- light
- semiconductor
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005424 photoluminescence Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 2
- 230000007704 transition Effects 0.000 claims 2
- 238000004020 luminiscence type Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983990U JPH03110836U (en]) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983990U JPH03110836U (en]) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110836U true JPH03110836U (en]) | 1991-11-13 |
Family
ID=31522943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983990U Pending JPH03110836U (en]) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110836U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994006151A1 (fr) * | 1992-09-08 | 1994-03-17 | Kabushiki Kaisha Komatsu Seisakusho | Procede de detection concernant une profondeur de gravure |
-
1990
- 1990-02-28 JP JP1983990U patent/JPH03110836U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994006151A1 (fr) * | 1992-09-08 | 1994-03-17 | Kabushiki Kaisha Komatsu Seisakusho | Procede de detection concernant une profondeur de gravure |